Photoelectron bremsstrahlung spectrum in synchrotron radiation excited total reflection x-ray fluorescence analysis of silicon wafers
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چکیده
منابع مشابه
Synchrotron radiation-induced total reflection X-ray fluorescence analysis
Synchrotron radiation-induced total reflection X-ray fluorescence (SR-TXRF) analysis is a high sensitive analytical technique that offers limits of detection in the femtogram range for most elements. Besides the analytical aspect, SR-TXRF is mainly used in combination with angle-dependent measurements and/or X-ray absorption near-edge structure (XANES) spectroscopy to gain additional informatio...
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As dimensions in state-of-the-art CMOS devices shrink to less than 0.1 pm, even low levels of impurities on wafer surfaces can cause device degradation. Conventionally, metal contamination on wafer surfaces is measured using Total Reflection X-Ray Fluorescence Spectroscopy (TXRF). However, commercially available TXRF systems do not have the necessary sensitivity for measuring the lower levels o...
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Having established detection limits for transition elements exceeding current requirements of the semiconductor industry, our recent efforts at the Stanford Synchrotron Radiation Laboratory (SSRL) have focused on the improvement of the detection sensitivity for light elements such as Al. Data analysis is particularly challenging for Al, due to the presence of the neighboring Si signal from the ...
متن کاملSynchrotron Total-reflection X-ray Fluorescence (sr-txrf) of Genesis Return Samples
SAMPLES. S. Brennan 1 , H.A. Ishii 2 , K. Luening 1 , P. Pianetta 1 , and D.S. Burnett 3 , 1 Stanford Synchrotron Radiation Laboratory, Stanford Linear Accelerator Center, Stanford, CA 94025, USA ([email protected]), 2 Institute for Geophysics and Planetary Physics, Lawrence Livermore National Laboratory, Livermore, CA 94550, USA ([email protected]), 3 California Institute of Technolo...
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We evaluated the vascular volume distribution with fine resolution (0.1-1.3 mg myocardial tissue) in the sagittal plane of the left ventricle by using the microsphere filling method in 21 dogs. The coronary arterial volume density in the sagittal plane did not exhibit normal distribution and was characterized by variability among the outer-to-inner layers and within the layers (+2SD/-2SD > 80 t...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 1999
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.370821